Thin Film
layer of material ranging < a nanometer to > a micrometer in thickness.
See Also: Film, Ellipsometers
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Reflectance Standards
STAN Series
Ocean Optics offers specular reflectance standards for measuring shiny surfaces such as machined metals and semiconductor materials and low-reflectivity surfaces such as anti-reflective coatings and thin film coatings. The STAN-SSH varies in reflectivity from 87%-98% over the 200-2500 nm wavelength range and is available in a version (STAN-SSH-NIST) calibrated to a NIST master standard. The NIST calibration data range is 250-2500 nm.
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Thin Film Metrology Systems
Gemini Series
The n&k Gemini-TF, Gemini-TF-M and Gemini-FPD are specifically designed for measurements of patterned and unpatterned films on transparent or opaque substrates. These tools are used extensively for solar cell, flat panel and photomask applications. The tools belonging to the Gemini-TF Series are based on unpolarized Reflectance (R) and unpolarized Transmittance (T) measurements, with a 50μm spot size for both R and T. R and T are simultaneously measured to determine film thickness and n and k spectra from 190nm – 1000nm
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Optical Thin-Film Metrology for Advanced Thin Films
FilmTek 6000 PAR-SE
Scientific Computing International
Production-proven metrology system for film thickness, refractive index and stress measurement for a broad range of film layers at the 1x nm design node and beyond. Accommodates 200 or 300 mm wafer metrology. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to meet the challenging demands associated with multi-patterning and other leading-edge device fabrication techniques.
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1550 & 1310/1490nm MWDM
WD1543
Hangzhou Huatai Optic Tech. Co., Ltd.
WD1543 WDM is based on mature thin film filtering tech, with wide bandwidth, flatness, low insertion loss and high isolation. It is mainly applied to FTTx PON network to achieve the combination and separation of the 1550nm (CATV) and 1310/1490nm (data).
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Compact Passive and Active Resistor Trimming for Thick and Thin Film
LRT 2000C
*Travel: 6" x 6"*Laser : Fiber Laser Ytterbium 1064 nm*Kerf: 30 to 80 micron Adjustable*Pulse width : 80 nano second*Rap Rate: 1 to 1 million Pulse Per Second*Average Power: 20 watts
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Spectroscopic Ellipsometer
PH-SE
The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
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Instrumented Indentation Tester
With Anton Paar’s versatile indentation testers you can precisely determine the mechanical properties of thin films, coatings, or substrates such as hardness and elastic modulus. The instruments handle almost any type of material, whether soft, hard, brittle, or ductile. You can also conduct creep, fatigue, and stress-strain studies on surfaces in the nanometer range.
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Stress Hysteresis Measurement
500 Series
Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in air.Non-Contact Laser Scanning Technology.
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Fully Automatic Non-contact Sheet Resistance Measurement System For Flatpanel Display
NC-60F/RS-1300N
*Global standard for non-contact measurement of ITO film, Metal thin films on flat panel*Automatic X-Y and Z (eddy current probe head) axis moving mechanism*Compatible with Loading robot for fully automatic measurementOption :*Integlate to combined system (film thickness meter, etc)*Add 4 point probe measurement unit : RT-3000
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RFoG 4-Band Multiplexer. 1550, 1590 & 1310/1490nm MWDM
WD5943
Hangzhou Huatai Optic Tech. Co., Ltd.
WD5943 WDM is based on mature thin film filtering tech, with wide bandwidth, flatness, low insertion loss and high isolation. It is mainly applied to FTTx PON network to achieve the combination and separation of the 1550nm (CATV) and 1310/1490nm (data).
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Metrology System
IMPULSE V
With tighter wafer-to-wafer and within-wafer uniformity tolerances, integrated metrology systems are in use across various semiconductor processing steps. Based on demonstrated high-resolution optical technology, the IMPULSE V system provides higher sensitivity to thin film residue measurements during the CMP process. The IMPULSE platform boasts the industry’s most reliable hardware with best-in-class reliability and productivity metrics.
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Coating Thickness Gauge - Integral
Elcometer 456
Whether you are measuring on smooth, rough, thin or curved surfaces, the Elcometer 456 Dry Film Thickness Gauge produces accurate, temperature stable measurements thanks to its ±1% thickness measurement capability and increased reading resolution.
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Filters / Splitters / Detectors
DiCon’s 100 GHz WDM is designed to multiplex and demultiplex signals in multi-wavelength systems based on the ITU 100 GHz grid. The component uses a thin film filter mounted between a pair of GRIN lens collimators. The 100 GHz WDM is housed in a compact, environmentally stable package that offers superior resistance to humidity and temperature and is suitable for mounting on a printed circuit board or within a module.
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Hybrid Amplifiers
Limiting
Macom Technology Solutions Holdings Inc.
MACOM offers a complete line of RF and microwave limiting amplifiers. Our limiting amplifiers use the latest thin film hybrid manufacturing techniques to obtain the highest level of performance, repeatability, and reliability. MACOMs portfolio of amplifiers range from 10 MHz to 4 GHz and are ideally suited for hi-reliability and mission critical applications.
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Dynamic Ultra Micro Hardness Tester
DUH-210/DUH-210S
A new evaluation system for measuring the material strength of micro regions, such as semiconductors, LSI, ceramics, hard disks, vapor deposited films, and thin coating layers, not addressed by previous hardness testers. It can also be used to evaluate the hardness of plastics and rubbers. This instrument uniquely measures dynamic indentation depth, not the indentation after the test. This in turn permits measurement of very thin films and surface (treatment) layers that are impossible to measure with conventional methods. Additionally, this same method supplies the data needed to calculate elastic modulus on the test specimens.
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Chip Resistors
Panasonic Industrial Devices Sales Company of America
Panasonic offers a wide range of Chip Resistors including conventional Thick Film Chip Resistors, Specialized Resistors such as Thin Film, Current Sense, Anti-Sulfur, Anti-Surge and Metal Film Chip Resistors.Panasonic’s standard Thick Film Chip Resistors are offered in cases sizes from 01005 to 2512.
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Scatterometers / Thin film Metrology Systems
Olympian Series
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers / Thin Film Metrology Systems: The n&k Olympian, n&k Olympian-450 and n&k Olympian-M are DUV-Vis-IR scatterometers/thin film metrology systems with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series.
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AI ANALYZER
Nanotronics uses artificial intelligence to give our customers’ unprecedented freedom and control for defect detection. We offer an AI based Anomaly Detection Algorithm (ADA) toolkit that automates the work of writing computer vision algorithms to detect and classify defects on bare substrate and epi wafers as well as on thin films, glass and any other material with a uniform background.
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Ellipsometer
alpha-SE®
For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press "measure". You have results within seconds. Works with your materials - dielectrics, semiconductors, organics, and more.
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Audio Line Drivers and Receivers
Analog Devices audio line driver and receiver solutions feature differential-output buffer amplifiers and differential input buffer amplifiers to support a wide range of applications. By using low noise thermally matched thin film resistors and high slew rate amplifiers, these parts maintain the sonic quality of audio systems by eliminating power line hum, RF interference, voltage drops, and other externally generated noise commonly encountered with long audio cable runs. Applications involving this product portfolio include ADC drivers, high performance audio, sine/cosine encoders, and other professional and consumer uses.
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Multi-Element Standards
These multi-element standards consist of multi-layer thin film coatings, one on top of the other, upto a maximum of 6 elemental coatings. It is generally recommended to have coating thicknesses < 20 µg/cm2, so as to cause negligible notable matrix effects, in particular absorption of X-rays emitted in lower deposits by those covering them.
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200GHz DWDM Module(4,8,16 Channel)
Flyin Optronics’ 200GHz dense wavelength division multiplexer (DWDM) utilizes thin film coating technology and proprietary design of non-flux metal bonding micro optics packaging to achieve optical add and drop at the ITU wavelengths. It provides ITU channel center wavelength, low insertion loss, high channel isolation, wide pass band, low temperature sensitivity and epoxy free optical path . It can be used for wavelength add/drop in telecommunication network system.
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Time-Resolved Electrochemical Quartz Crystal Microbalance
400C Series
The quartz crystal microbalance (QCM) is a variant of acoustic wave microsensors that are capable of ultrasensitive mass measurements. Under favorable conditions, a typical QCM can measure a mass change of 0.1-1 ng/cm2. QCM oscillates in a mechanically resonant shear mode under the influence of a high frequency AC electric field which is applied across the thickness of the crystal. Figure 1b below shows an edge view of a QCM crystal undergoing oscillatory shear distortion. The central portions of the top and bottom of the crystal are coated with a typically disk-shaped thin metal film (e.g., gold).
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Surface Analysis
A UHV surface analysis system for thin film depth profilingMeasures the surface composition of the first few nanometers and/or micrometers depth of solid samples.
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Explosion Proof In-line Hydrogen Process Analyzer
HY-OPTIMA™ 2700 Series
The HY-OPTIMA™ 2700 Series uses a solid-state, non consumable sensor that is configured to operate in process gas streams. The H2scan thin film technology provides a direct hydrogen measurement that is not cross sensitive to other gases. The HY-OPTIMA™ 2700 Series is ideal for applications where real-time, hydrogen specific measurements can enhance process plant efficiencies, diagnostics and maintenance management.
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40-CH 100G Athermal AWG
Athermal AWG(AAWG) have equivalent performance to standard Thermal AWG(TAWG) but require no electrical power for stabilization. They can be used as direct replacements for Thin Film Filters(Filter type DWDM module) for cases where no power is available, also suitable for outdoor applications over -30 to +70 degree in access networks. Flyin’s Athermal AWG(AAWG) provide excellent optical performance, high reliability, ease of fiber handling and power saving solution in a compact package. Different...show more -
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Thin Film Based Thermopile Detector: 4 Channels
2M Quad
A four-channel thin-film thermopile in a TO-8 package. Each active area is 2mm x 2mm. Offers the world's highest 4-channel sensitivity with exceptional signal-to-noise performance in a TO-8 package. Internal aperture minimizes channel-to-channel crosstalk while increasing sensitivity.
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Multi-Test Resistivity Measurement System
Sheet resistance mapping of thin films with a collinear 4-point probe, Temperature co-efficient of resistance (TCR) of thin films with collinear 4-point probe, Precision temperature co-efficient of resistance (TCR) with 2-point Kelvin probes and precision surface temperature probe, resistor testing with 2-point Kelvin probes,Precision resistor testing with a Kelvin probe card, temperature co-efficient of resistance resistor test (TCR), and Standard TCR test of multiple resistors with Kelvin probes or a probe card.
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Customized Ellipsometers
~0.1 nm thickness difference can be seen by IE-1000.Thickness distribution of thin film can be imaged.Thickness and optical images of semiconductor device, display, and bio samples.IE-1000 can show the images which can not be seen by conventional microscope.Defect of semiconductor and display can be seen directly.Easy and fast operation.
